Introduction of Core Technology

Meter-Lab. Inc. possesses 1D spectroscopy and hyperspectral technologies based on spectral interference techniques. Utilizing high-precision optical interferometry, the company has developed core technologies for spectroscopic interferometers, reflectometers, and ellipsometers. These technologies enable non-contact, non-destructive, high-speed measurements through only single spectral data acquisition without mechanical scanning.

• Spectroscopic Technology
• Spectroscopic Interferometry

Spectroscopic Technology

1D Spectroscopy

[Principle] The light emitted from the optical fiber is dispersed by a diffraction grating according to wavelength, and the light intensity at each wavelength is detected by a 1D image sensor.

Hyperspectral Imaging

[Principle] The light reflected from the sample is imaged on the 1D slit through objective lens, and the spatial line image filtered by 1D slit is dispersed by a diffraction grating according to wavelength, thereby detecting it on a 2D image sensor along the vertical axis (spatial axis) and the horizontal axis (wavelength axis)

Spectroscopic Interferometric Measurement Technology

Spectroscopic Interferometer

[Principle] Determination of thickness/surface shape/distance by analyzing the period of interference spectrum according to the change of optical path differences

Spectroscopic Reflectometer

[Principle] Determination of thin-film thickness by analyzing interference spectrum generated by multiple-interference at the interfaces of thin-film layer

Spectroscopic Ellipsometer

[Principle] Analysis of optical properties of the material by measuring the ratio changes of both amplitude and phase of the light reflected from the sample depending on the polarization state