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Measurement Sensor

Meter-Lab. Inc.'s t-Nova series provides a total solution for non-contact, high-resolution, high-speed thickness measurement. Our measurement sensors contains our own spectrometers(s-Nova series), light source, controller, and software, and measures based on the spectral domain interferometer (SDI) method.

  • The R model is compact and simple in structure, using the Spectroscopic Reflectometry (SR) method.
  • The T model operates based on a simple yet robust transmission-type optical system.
  • The TN model provides an unprecedented feature that simultaneously measures physical thickness and refractive index.
Thickness
Shape
Distance
Material
Classification
Model Name Measurement Method Measured Quantity Measurement Range Measurement Speed Measurement Resolution Measurement Precision Measurement Uncertainty Spectroscopic Modules
t-Nova-525R Point Thickness 10 nm - 200 μm 250 kHz 0.01 nm s-Nova-525
t-Nova-850R/T Point Optical Thickness, Surface 9 μm – 1.5 mm 250 kHz 1 nm 1 nm 13 nm s-Nova-850
t-Nova-1550R/T Point Optical Thickness, Surface 30 μm – 5 mm 40 kHz 1 nm 4 nm 12 nm s-Nova-1550
t-Nova-850TN Point Thickness, Group Refractive Index 9 μm – 1.5 mm 250 kHz 1 nm 1 nm 13 nm s-Nova-850
t-Nova-1550TN Point Thickness, Group Refractive Index 30 μm – 5 mm 40 kHz 1 nm 4 nm 12 nm s-Nova-1550
t-Nova-840-60 Point Thickness, Surface, Distance 20 μm – 6 mm 250 kHz 1 nm 1 nm 18 nm s-Nova-840-60
t-Nova-1550-60 Point Thickness, Surface, Distance 60 μm – 10 mm 40 kHz 1 nm 10 nm 13 nm s-Nova-1550-60
t-Nova-575H Line Optical Thickness, shape 50 μm - 340 μm 200 Hz 0.1 nm 0.6 nm 50 nm s-Nova-575H
t-Nova-850H Line Optical Thickness, shape 9 μm – 910 μm 1 kHz 1 nm s-Nova-850H
S-Module Areal Stage 110 mm (X) x 75 mm (Y) 250 mm/s 0.1 µm 0.25 µm - -
G-Module Areal Galvanometer 18 mm (X) x 18 mm (Y) 175 Hz (Triangular Wave) - - - -
M-Module Multi-Channel Optical Switch 2/4/6/8 Channels - - - - -