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Measurement Sensor

Meter-Lab. Inc.'s t-Nova series provides a total solution for non-contact, high-resolution, high-speed thickness measurement. Our measurement sensors contains our own spectrometers(s-Nova series), light source, controller, and software, and measures based on the spectral domain interferometer (SDI) method.

  • The R model is compact and simple in structure, using the Spectroscopic Reflectometry (SR) method.
  • The T model operates based on a simple yet robust transmission-type optical system.
  • The TN model provides an unprecedented feature that simultaneously measures physical thickness and refractive index.
Thickness
Shape
Distance
Material
Classification
Model Name Measurement Method Measured Quantity Measurement Range Measurement Speed Measurement Resolution Measurement Precision Measurement Uncertainty Spectroscopic Modules
t-Nova-525R Point Thickness 50 nm - 200 μm 250 kHz 0.1 nm 0.1 nm 2.1 nm s-Nova-525
t-Nova-850R Point Thickness 6 μm – 1.2 mm 250 kHz 10 nm s-Nova-850
t-Nova-850T Point Thickness 6 μm – 1.2 mm 250 kHz 10 nm s-Nova-850
t-Nova-850TN Point Thickness 6 μm – 1.2 mm 250 kHz 10 nm s-Nova-850
t-Nova-1550R Point Thickness 20 μm – 3 mm 40 kHz 10 nm s-Nova-1550
t-Nova-1550T Point Thickness 20 μm – 3 mm 40 kHz 10 nm s-Nova-1550
t-Nova-840-60 Point Distance, Thickness 6 mm 250 kHz 10 nm s-Nova-840-60
t-Nova-1550-60 Point Distance, Thickness 6 mm 40 kHz 10 nm s-Nova-1550-60
t-Nova-530H Line Thickness, shape 2 mm 200 Hz 100 nm (Thickness), 18 μm (Horizontal) s-Nova-530H
t-Nova-575H Line Thickness, shape 5 μm - 685 μm 213 Hz 0.22 nm s-Nova-575H
t-Nova-850R-H Line Thickness, shape 500 μm (Optical thickness), 25 mm (Measurement width) 200 Hz 50 nm (Thickness), 27 μm (Horizontal) s-Nova-850H
t-Nova-850H Line Thickness, shape 18 μm – 1824 μm 1060 Hz 0.2 nm s-Nova-850H