Intellectual Property Rights

[The 1st Optical Metrology Application Technology Seminar] High-Speed Three-Dimensional Shape Measurement based on Hyperspectral Technology for Advanced Manufacturing Processes

[The 7th Precision Measurement Workshop] Hyperspectral-based Thickness and Shape Measurement Technology

[2023 Winter Conference of the Optical Society of Korea] Integrated Optical Metrology System for Three-Dimensional Shape Measurement of Micro-Scale Patterns

[2022 SPIE Optics & Photonics] Absolute distance measurement using polarization-based spectral-do

[2022 Spring Conference of the Korean Society for Precision Engineering] Development of an Optical Metrology System for Three-Dimensional Shape Measurement of Micro Through-Silicon Vias

[2022 Winter Conference of the Optical Society of Korea] Thickness Measurement Using a Combined Interferometric Method in a Large Dynami

[2021 Autumn Conference of the Korean Society for Precision Engineering] Development of an Optical Interferometer for Thickness Measurement over a Multiscale Range