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Publications
[The 8th Precision Measurement Workshop] Real-Time Multichannel In-Process Inspection Technology Using High-Resolution Hyperspectral Techniques
Inventor
Jaeseok Bae, Heulbi Ahn, Jonghan Jin, Jungjae Park
Publications
Approaching the Quantum-Limited Precision in Frequency-Comb-ba
sed Spectral Interferometric Ranging
Inventor
Heulbi Ahn
Publications
Realizing Quantum-Limit-Level Precision with an Optical-Comb-ba
sed Spectral-Domain Interferometer
Inventor
Hulbe Ahn
Publications
[The 32th Korean Conference on Semiconductors] High-Speed Thickness and Shape Measurement Technology ba
sed on Hyperspectral Interferometry for Advanced Semiconductor and Display Manufacturing Proc
Inventor
Heulbi Ahn, Jungjae Park, Jonghan Jin
Publications
Thin Film Thickness Analysis Using a Deep Learning Algorithm with Consideration of Reflectance Fluctuations
Inventor
Joonyoung Lee
Publications
Research on Deep-Learning Algorithm for Thin-Film Thickness Measurement Reflecting Measurement Envir
Inventor
Joonyoung Lee
Publications
[2024 Autumn Conference of the Korean Society for Precision Engineering] Uncertainty Evaluation of Multil
ayer Thin-Film Thickness Measurement Using Spectroscopic Reflectometry
Inventor
Jaeseok Bae, Jonghan Jin
Publications
[2024 Autumn Conference of the Korean Society for Precision Engineering] High-Speed Thickness and Shape Measurement Technology ba
sed on a Hyperspectral Camera
Inventor
Heulbi Ahn, Jungjae Park, Jonghan Jin
Publications
[2024 Autumn Conference of the Korean Society for Precision Engineering] Performance Improvement of a Deep Learning Algorithm for Thin-Film Thickness Analysis Considering Reflectance Fluctuations
Inventor
Joonyoung Lee, Jungjae Park, Jonghan Jin
Publications
[2024 CLEO-PR (Cleo Pacific Rim)] An optical measuring method for three-dimensional surface profile
Inventor
Heulbi Ahn, Jonghan
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