t-Nova-850/1550R
Thin film thickness measurement sensor
Thin film thickness measurement sensor
Wavelength range | 750 nm - 950 nmㅤ/ㅤ1490 nm - 1610 nm |
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Thickness measurement resolution | 10 nm (or 0.1 nm) |
Thickness measurement range | 400 nm - 1.2 mm / 2 μm - 3 mm |
Maximum Measurement speed | 250 kHz / 40 kHz |
Measurement principles | Spectral-domain inteterferometry, Spectroscopic reflectometry |