t-Nova-850/1550TN
Ultrafast thickness measurement sensor
Ultrafast thickness measurement sensor
Wavelength range | 750 nm - 950 nmㅤ/ㅤ1490 nm - 1610 nm |
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Thickness measurement resolution | <10 nm, Refractive index : 10^-3 |
Thickness measurement range (General glass) | 6 μm - 1.2 mm / 20 μm - 3 mm |
Maximum Measurement speed | 250 kHz / 40 kHz |
Measuring tolerance angle | <±5º |
Measurement principle | Spectral-domain interferometry |
Standard specimen | KRISS standard thickness specimen provided |